Ceramic MEMS pressure sensor

The ceramic MEMS series is packaged in a dual in-line configuration for temperature compensated varistor pressure sensors. This family ensures a reliable, superior performance and cost-effective solution for cost-sensitive applications over a wide temperature range. A gain resistor is included to standardize the FSO.

Specification

• Working pressure, Gauge pressure and differential pressure: 5psi, 15psi, 30psi, 50psi, 100psi
• Absolute pressure: 15 psi, 30 psi, 50 psi, 100 psi
• Operating temperature: -40°C-+125°C
• Storage temperature: -40°C-+150°C
• Temperature compensation range: 0°C-+80°C
• Burst pressure: over triple working pressure
• Working medium: Dry air
• FSO Output: 100mv±25mv
• Zero pressure output: ±2mv
• Linear: ±0.1% FSO
•  Input impedance: 5000±1000Ω
• Output impedance: 4000±1000Ω
• Full temperature zone accuracy: ±0.5% FSO
• Input current: <2mA
• ESD standard: PIN needle air discharge ± 8KV
•                          housing air discharge ±16KV
• EMC standard: ISO11452-5
• (512MHz-1GHz) 50V/m
• (1MHz-512MHz) 100V/m